Method for separating bonded bodies using excimer light irradiation

摘要

Disclosed is a method for separating a bonded body, whereby the bonded body can be separated easily. Specifically disclosed is a method for separating bonded bodies that includes a step that irradiates excimer light with a central wavelength of 1 to 300 nm on to a bonded body that has been formed by using an adhesive composition to bond substrates together, which includes and is formed by one type or two or more types of meth (acrylate) that have one or more (meth)acryloyl groups, and by hardening of said adhesive composition. At least one of the substrates is permeable to the excimer light.

主权项

1. A method for separating bonded parts said bonded parts being formed by bonding two substrates to each other using an adhesive composition comprising one or more types of (meth)acrylate having at least one (meth)acryloyl groups, and curing said adhesive composition, and said at least one substrates being transparent to excimer light, comprising:
a step of irradiating said bonded parts with excimer light of a center wavelength of 1 to 300 nm, wherein said (meth)acrylate is selected from a group consisted of isobornyl (meth)acrylate; 2-hydroxyethyl (meth)acrylate; dicyclopentenyloxyethyl (meth)acrylate; and an (meth)acrylate oligomer with a main-chain backbone of at least one selected from a group consisted of polybutadiene and hydrogenated polybutadiene, having at least one (meth)acryoyl groups, and the number average molecular weight of 500 to 5000.