| 摘要 |
<p>SYSTEMS, METHODS, AND PROCESSES FOR SEPARATING A TEMPLATE FROM A SUBSTRATE RETAINED ON AN AIR CAVITY CHUCK DURING AN IMPRINT LITHOGRAPHY PROCESS. GENERALLY, VACUUM LEVEL PROVIDED BY AIR CAVITY CHUCK MAY BE CONTROLLED DURING CONFORMING OF POLYMERIZABLE MATERIAL BETWEEN THE TEMPLATE AND THE SUBSTRATE AND DURING SEPARATION OF THE TEMPLATE AND THE SUBSTRATE.</p> |
