Method for slicing a multiplicity of wafers from a crystal composed of semiconductor material

摘要

A method for slicing a plurality of wafers from a crystal includes providing a crystal of semiconductor material having a longitudinal axis, a cross section and at least one pulling edge. The crystal is fixed on a table and guided through a wire gang defined by sawing wire so as to form the wafers. The guiding is provided by a relative movement between the table and the wire gang such that entry sawing or exit sawing using the sawing wire occurs in a vicinity of the at least one pulling edge of the crystal.

主权项

1. A method for slicing a plurality of wafers from a crystal comprising:
providing a crystal of semiconductor material having a longitudinal axis, a cross section and at least one pulling edge; fixing the crystal on a table; guiding the crystal through a wire gang defined by sawing wire so as to form the wafers, the guiding provided by a relative movement between the table and the wire gang such that the wire gang initiates or completes cutting of crystal in a vicinity of a selected pulling edge of the crystal.