Ultra-thin polymeric adhesion layer

摘要

An imprint lithography imprinting stack includes a substrate and a polymeric adhesion layer adhered to the substrate. The polymeric adhesion layer includes polymeric components with an extended backbone length of at least about 2 nm. The backbones of the polymeric components may be substantially aligned in a planar configuration on the surface of the substrate, such that a thickness of the polymeric adhesion layer is less than about 2 nm.

主权项

1. An imprint lithography imprinting stack comprising:
a substrate; a polymeric adhesion layer adhered to the substrate, wherein the polymeric adhesion layer is formed from a polymerizable composition comprising a polymeric component, the polymeric component comprising a repeating aromatic group, and wherein a thickness of the polymeric adhesion layer is less than about 2 nm.