Optoelectronic devices having electrode films and methods and system for manufacturing the same

摘要

A method and system for DC magnetron sputtering deposition of films on plastic substrates. The method includes using a shield to block deposition in a spatial region corresponding to a plasma region formed during magnetron sputtering. An optoelectronic device including an amorphous electrode film is also disclosed.

主权项

1. A method of making an electrode film, the method comprising:
providing a target; moving a substrate relative to the target; positioning a shield to preferentially block a spatial region of sputtered target material from depositing on the substrate, wherein the spatial region corresponds to a higher density plasma region of plasma formed during DC magnetron sputtering, wherein the shield is held stationary relative to the target; and DC magnetron sputtering said target to deposit an electrode film on the substrate.