Electrostatic chuck

摘要

An electrostatic chuck includes: a ceramic substrate; a ceramic dielectric body provided on a top side of the ceramic substrate and having a first major surface where a processing target substrate is to be mounted; and an electrode provided between the ceramic substrate and the ceramic dielectric body. A material of the ceramic dielectric body is a ceramic sintered body. A plurality of protrusions and a groove for supplying a gas are provided on the first major surface of the ceramic dielectric body. A through hole is provided in a bottom face of the groove, the through hole penetrating to a second major surface of the ceramic substrate on a side opposite to the first major surface. A distance between the electrode and the groove is greater than or equal to a distance between the electrode and the first major surface.

主权项

1. An electrostatic chuck comprising:
a ceramic substrate; a ceramic dielectric body provided on a top side of the ceramic substrate and having a first major surface where a processing target substrate is to be mounted; and an electrode provided between the ceramic substrate and the ceramic dielectric body, a material of the ceramic dielectric body being a ceramic sintered body, a plurality of protrusions and a groove for supplying a gas being provided on the first major surface of the ceramic dielectric body, a through hole being provided in a bottom face of the groove, the through hole penetrating to a second major surface of the ceramic substrate on a side opposite to the first major surface, a distance between the electrode and the groove being greater than or equal to a distance between the electrode and the first major surface, and a depth from the first major surface to the bottom face of the groove is less than or equal to a depth from the first major surface to a major surface of the electrode.