MEMS switch and communication device using the same

摘要

A MEMS switch is provided wherein contact force sufficient to make a contact having low contact resistance is maintained after contact-formation to maintain low contact resistance at the signal transmission contact in “on” state. Provided is a MEMS switch 100 including a first electrode 101, a second electrode 104 opposed to and separated from the first electrode, a third and a fourth electrodes 1021 and 1022, wherein electrical contact is made between the electrodes 101 and 104 by electrostatic force generated between the electrode 101 and the electrodes 1021, 1022, and a bump which can form the contact between the electrode 101 and the electrode 1021 and/or 1022 is provided on the electrode 101, and a gap is formed between the electrode 101 and the electrode 1021 and/or 1022 when the electrical contact is made, and control signals are input to the electrodes 1021 and 1022 independently.

主权项

1. A MEMS switch comprising:
a movable electrode, a signal electrode which is separated from and opposed to the movable electrode, and a counter electrode which is separated from and opposed to the movable electrode, wherein, the movable electrode is configured to move and make electrical contact with the signal electrode due to an electrostatic force generated between the movable electrode and the counter electrode, one of the movable electrode and the counter electrode is divided into two or more electrically-separate electrodes and is configured to receive electrical voltage which generates the electrostatic force between the movable electrode and the counter electrode, the electrical voltage is applied to the respective electrically-separate electrodes with a time difference, and the electrically-separate electrodes are disposed symmetrically about the signal electrode wherein the electrical voltage applied to the electrically-separate electrodes with the time difference includes a first voltage applied to the first one of the electrically-separate electrodes and a second voltage different than the first voltage applied to the second one of the electrically-separate electrodes.