Inertial force sensor

摘要

An inertial force sensor includes a detecting device which detects an inertial force, the detecting device having a first orthogonal arm and a supporting portion, the first orthogonal arm having a first arm and a second arm fixed in a substantially orthogonal direction, and the supporting portion supporting the first arm. The second arm has a folding portion. In this configuration, there is provided a small inertial force sensor which realizes detection of a plurality of different inertial forces and detection of inertial forces of a plurality of detection axes.

主权项

1. An inertial force sensor comprising:
a detecting device which detects an inertial force, wherein the detecting device includes:
two first beams,two second beams each comprising beam portions extending from one of the first beams, each end of the two second beams has at least one folding portion, wherein each end of the two second beams are capable of being driven and oscillated in a first direction, two different directions of angular velocity are detected by detecting Coriolis force corresponding to the driving and oscillation.