IMPRINT METHOD AND IMPRINT DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an imprint method which prevents damages etc. of a mold and stably manufactures a highly accurate pattern structure, and to provide an imprint device.SOLUTION: An imprint device 1 includes: at least a mold holding part 2 for holding a mold; a substrate holding part 4 for holding a transfer substrate; a resin supply part 6 which supplies a molded resin to the transfer substrate; and a static eraser 8 which supplies ions to the mold held by the mold holding part. The static eraser 8 at least includes a discharge electrode 9 which generates ions and a power source which supplies a voltage to the discharge electrode 9. The ions generated from the discharge electrode 9 are moved by coulomb force.