| 摘要 |
PROBLEM TO BE SOLVED: To provide a low pressure arc plasma immersion coating deposition and ion processing in which improved coating properties is achieved by generating high energy particles in a coating process.SOLUTION: A coating system comprises a vacuum chamber and a coating assembly. The coating assembly comprises a vapor source, a substrate holder, an anode electrically connected to and separated from a cathode target, and a cathode chamber assembly. The cathode chamber assembly comprises the cathode target, a selective main anode, and a shield for insulating the cathode target from the vacuum chamber. The shield forms an opening from the cathode target to a separated anode so that electron emission current of a separated arc discharge flows along longitudinal direction of a target plane. A first current source is connected between the cathode target and the main anode and a second current source is connected between the cathode target and the separated anode. Linear dimension of the separate anode and a dimension of the vapor source along short direction is parallel to dimension along which the arc spot is lead along the cathode target. |
