| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of forming a functional film on a surface of a sheet-like substrate by an aerosol deposition method (AD method).SOLUTION: A functional film forming method has: a decompression space forming process of bringing a decompression chamber, which is capable of covering a functional film forming region of a part or all of a substrate in which a protective layer by resist is formed on a surface other than a functional film forming region, into contact with the functional film forming region on the substrate so as to cover the region, and forming a local decompression space in the decompression chamber; a decompression process of reducing pressure in the local decompression space; a film forming process of supplying a fine power material to the local decompression space in a decompressed state, ejecting and colliding the fine powdery material at high speed onto the substrate by an aerosol deposition method to fuse the material, and forming a functional film on a functional film forming region of the substrate; and a removing process of removing the protective layer on the substrate surface. |
