HEIGHT STANDARD SAMPLE, METHOD FOR MANUFACTURING THE SAME, AND DEVICE FOR MANUFACTURING HEIGHT STANDARD SAMPLE

摘要

PROBLEM TO BE SOLVED: To manufacture a standard sample with high accuracy.SOLUTION: A method for manufacturing a height standard sample comprises a step for selectively irradiating a first region 20 out of the first region 20 and a second area 22 with an oxygen ion 42 so that difference in level is formed at a boundary between the first region 20 and the second area 22 on a surface of a silicon substrate 10.