| 摘要 |
PROBLEM TO BE SOLVED: To provide a cryopump suitable for evacuation of non-condensable gas, and an evacuation method.SOLUTION: A cryopump 10 comprises: a radiation shield 30 including a shield front end 28 that defines a shield opening 26, a shield bottom part 34, and a shield side part 36 that extends between the shield front end 28 and the shield bottom part 34; and a cryopanel assembly 20 that is cooled to a temperature lower than that of the radiation shield 30. The cryopanel assembly 20 comprises: a first panel arrangement 61 including a plurality of first adsorption panels 60; and a plurality of second panel arrangements 63 each including a plurality of second adsorption panels 62. A plurality of adsorption sections each exposed to the shield side part 36 are formed in a grid pattern by the first panel arrangement 61 in cooperation with the plurality of second panel arrangements 63. |
