| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method producing cyclic silane from a cyclic halosilane compound in good productivity and good reproductivity and also capable of easily achieving purification of the cyclic silane.SOLUTION: The method of manufacturing cyclic silane includes a pulverization process for pulverizing a solid cyclic halosilane compound and a reaction process for producing cyclic silane represented by the formula (1): SiR(1), where n is an integer of 3 to 10, and R represents hydrogen, an organic group having 1 to 10 carbon atoms or a silyl group, by contacting the resulting cyclic halosilane pulverized product with at least one kind selected from a hydride reducing agent and an organic metallic reaction agent. |
