| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique for preventing effect on displacement measurement due to vibration by the source of power for scanning in an inspection apparatus for measuring displacement while scanning a printed circuit board with an optical sensor.SOLUTION: A printed circuit board inspection apparatus has a structure in which a scan unit and a board support unit are separated from each other in terms of vibration by fixedly coupling the route of a base 10, a stage support member 24 holding power sources 23 and an XY stage 22 (the scan unit 20) and elastically coupling the base 10 and a board support member 31 (the board support unit) supporting a board 1 and in which lateral instability is prevented using X-/Y-direction holding members 50 to restrict movement in a direction parallel to the board 1 that may be caused by the elastic coupling. |
