| 摘要 |
PROBLEM TO BE SOLVED: To provide a physical quantity sensor suppressing reduction of a manufacturing yield and reduction of a detection sensitivity, and electronic equipment and a movable body using the same.SOLUTION: The physical quantity sensor includes: a movable weight 38; a plurality of movable electrodes 40a to 40j arrayed and extended in a direction to which the movable weight 38 is displaced from the movable weight 38; fixed electrodes 42a to 42j and 46a to 46j arranged respectively between the mutually adjacent movable electrodes. Top end parts of at least two mutually different fixed electrodes are provided with stoppers (stoppers 48a, 44e, and the like) extending toward the movable electrodes, and the extending directions of at least two mutually different stoppers are opposite each other. A gap (D1) between the stopper and the movable electrode is narrower than a gap (D2) between the fixed electrode and the movable electrode. |
