| 摘要 |
PROBLEM TO BE SOLVED: To suppress the intrusion of an unnecessary component into a treatment space.SOLUTION: In a heat treatment device 10, the circumference of a treatment tank 20 which performs heat treatment to an object 72 to be treated in an inert gas atmosphere, and forms a treatment space 21 is covered with an airtight external peripheral vessel 40. Furthermore, an external peripheral space 41 is formed between the external peripheral vessel 40 and the treatment tank 20. The heat treatment device 10 comprises: the treatment space 21; a hollow part 23; a treatment space gas supply device 60 which supplies an inert gas to the external peripheral space 41; a hollow part gas supply device 63; and an external peripheral space gas supply device 66. Furthermore, the heat treatment device 10 comprises: the treatment space 21; a treatment space gas purifier 50 which removes a prescribed unnecessary component other than the inert gas from the atmosphere of the external peripheral space 41; and an external peripheral space gas purifier 55. The treatment tank 20 has a treatment tank wall body 22 forming the treatment space 21, and the treatment tank wall body 22 has the hollow part 23 having a heat insulation material sealed therein. |
