| 摘要 |
PROBLEM TO BE SOLVED: To provide a MEMS device having reduced size, complexity, and cost.SOLUTION: The MEMS device comprises: a first rate sensor and a second rate sensor which are configured to oscillate in parallel to a planar surface; a drive element which communicates with at least one of the first and second rate sensors for providing a drive signal exhibiting a drive frequency; and a first coupling spring structure interconnecting the first and second rate sensors, by which the first and second rate sensors oscillate at the drive frequency in drive directions decided by the coupling spring structure. The drive direction of the first rate sensor is a first drive direction associated with a first axis, and the drive direction of the second rate sensor is a second drive direction associated with a second axis, and the second axis is perpendicular to the first axis. |
