AN APPARATUS FOR MOVING AND FLOATING THE SUBSTRATE BY AIR BLOWING TYPE

摘要

Provided is an apparatus for floating and transferring an air blowing type substrate. The apparatus for floating and transferring a substrate in one direction includes at least one base plate arranged in a transferring direction of the substrate; an air discharging unit which has a plurality of air supply lines formed to penetrate the inside of a body of the base plate to be aligned with the transferring direction of the substrate and a plurality of nozzle holes formed to penetrate an upper surface of the base plate to communicate with the air supply lines to discharge air in order to float the substrate; an air emitting unit which has a plurality of exhaust lines formed to penetrate the inside of the body of the base plate to be arranged between adjacent air supply lines and a plurality of exhaust holes formed to penetrate the upper side of the base plate to communicate with the exhaust lines in order to emit air colliding against the substrate to the outside; and an air supplying unit having an air block which is disposed at a lower side of the base plate and has a plurality of air supply holes corresponding to and communicating with the air supply lines to supply air to the air supply lines of which both ends are sealed.