| 摘要 |
PROBLEM TO BE SOLVED: To optimally manufacture high-dispersion nanoparticles.SOLUTION: A carrier gas is streamed along a specified streaming direction by a carrier gas feeding unit 5 within a chamber 2. Multiple target materials 9, furthermore, are retained side-by-side along the streaming direction within the chamber 2. Ablation particles are generated from the multiple target materials 9 as a result of irradiations thereof with laser beam pulses from an irradiating unit 4. The flow rate of the carrier gas is set in such a way that, regarding every combination of two mutually adjacent target materials 9 along the streaming direction, the time required for the mobilization of the carrier gas from the position of the upstream-side target material 9 to the position of the downstream-side target material 9 will be equal to or longer than the time elapsed since the generation of ablation particles on each target material 9 till the completion of the formation of nanoparticles as a result of the flocculation of the ablation particles. High-dispersion nanoparticles consisting of high dispersions of multiple types of nanoparticles corresponding respectively to the multiple target materials 9 can thus be manufactured optimally. |
