| 摘要 |
<p>PROBLEM TO BE SOLVED: To suppress occurrence of element falling without degrading workability in a manufacturing step.SOLUTION: A plurality of vibrators 100 are formed in a state being separated from each other, by dividing a piezoelectric body and a connection conductor part 22a by a first division groove at each specified interval while a plate-like piezoelectric body and the connection conductor part 22a are being stacked. Each of the plurality of vibrators 100 includes a plurality of sub die elements 101 formed by being divided further by a sub die groove parallel to a main die groove 31. The main die groove 31 is formed in such a manner as to be cut into the connection conductor part 22a, and a sub die groove 32 is shorter than the main die groove 31, with its lower end part separated from the connection conductor part 22a.</p> |
