METHOD OF ACQUIRING SETTLING TIME

摘要

PROBLEM TO BE SOLVED: To provide a method of acquiring an appropriate settling time in molding deflection for changing a graphic size.SOLUTION: A method of acquiring a settling time includes the steps of: drawing one or more reference patterns formed from charged particle beams of at least one molded shot on samples; drawing an evaluation pattern of which the pattern width size after resolution becomes equal with that of the reference pattern in design on the samples at every settling time while varying the settling time of a DAC amplifier for controlling a deflector regarding beam molding of the second shot, the evaluation pattern being formed by combining charged particle beams of two shots molded in first and second patterns of different sizes; calculating a differential between the pattern width size of the reference pattern and the pattern width size of the evaluation pattern at every settling time; and acquiring such a DAC amplifier settling time that the differential becomes equal or less than a threshold value.