| 摘要 |
PROBLEM TO BE SOLVED: To provide a touch mode capacitive pressure sensor that reduces influence of a depletion layer when a semiconductor is used for a fixed electrode, thereby improving decrease in a sensor output, deterioration in the temperature characteristics of the sensor output, and deterioration in the frequency characteristics.SOLUTION: A dielectric layer 33 is formed on an upper surface of a fixed electrode 32 composed of the semiconductor, and a recess 33a is formed on a surface of the dielectric layer 33. An upper substrate 35a is laminated on the surface of the dielectric layer 33 so as to cover the recess 33a, and a thin-film conductive diaphragm 35 is arranged over the recess 33a. The impurity concentration of the fixed electrode 32 is 2.00×10cmor more and 2.10×10cmor less. |
