FLOW LITHOGRAPHY TECHNIQUE TO FORM MICROSTRUCTURES USING OPTICAL ARRAYS

摘要

PROBLEM TO BE SOLVED: To provide a scalable and cost-effective continuous flow projection lithography system and fabrication method capable of fabricating microparticles or microstructures of a custom shape and composition.SOLUTION: A mask 304 is placed at a distance from a microlens array 306. Each element of the array projects one image of the mask onto a substrate, effectively forming an array on the substrate. A coating process allows functional regions of particles, namely, supporting layers that prevent adhesion of crosslinked polymers to surfaces.