LIFT PIN

摘要

The present invention provides a lift pin with enhanced life cycle while preventing damage to a substrate. The present invention, more specifically, relates to a lift pin which lifts the substrate from the bottom of a reaction chamber and comprises a head unit in contact with the bottom of the substrate; a connecting unit of which one end is connected to the head unit; and a body unit which is connected to the other end of the connecting unit at the lower portion of the connection unit and supports the head unit. The head unit can be pivot-rotatable on a vertical main shaft of the head unit against the body unit while being tilted by a particular angle against the body unit at the same time.