MICROWAVE SOURCE AND PLASMA TORCH, AND RELATED METHODS

摘要

PROBLEM TO BE SOLVED: To provide improved systems, devices and methods for generating microwave-induced plasma (MIP) for various applications.SOLUTION: A plasma source 100 for generating microwave-induced plasma includes a plasma torch 108 integrated with a microwave energy source 104. The torch 108 establishes a gas flow path from one side of the plasma source 100 to the other side. The torch 108 may be integrated with the microwave energy source 104 such that a plasma-forming gas flowing through the torch 108 is subjected to microwave radiation, which serves to initiate and/or sustain plasma in the torch 108. The plasma is ejected from the torch 108.