CERAMIC HEATER AND METHOD FOR MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To suppress in-plane variation of electrical resistivity while improving an inversion phenomenon of resistivity temperature dependency in a ceramic heater configured by burying a heater electrode in a ceramic base material.SOLUTION: An electrostatic chuck 10 includes a disk-shaped alumina ceramic base material 12 and a heater electrode 14 and an electrostatic electrode 16 which are buried in the alumina ceramic base material 12. An upper surface of the alumina ceramic base material 12 becomes a wafer placing surface 12a. The heater electrode 14 is patterned by knack of a single stroke so as to be wired over the whole surface of the alumina ceramic base material 12, and when voltage is applied, the heater electrode 14 generates heat and a wafer W is heated. The heater electrode 14 contains TiSias a main component.