| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrospray device capable of uniformly depositing a solution material as a thin film on a substrate.SOLUTION: The electrospray device 100 comprises: a nozzle 1 which sprays in the state where voltage is applied to a solution material; and a voltage control section 5 which applies a voltage to the solution material sprayed from the nozzle 1. Then, the solution material sprayed from the nozzle 1 is deposited as a thin film on a substrate 6. Further, the voltage control section 5 is configured to perform two steps of voltage application that after applying an initial voltage V1 for forming a state where a conical Taylor cone which consists of the solution material is formed at the tip of the nozzle 1 and droplets which consist of the solution material are not jetted out from the tip of the Taylor cone, a final voltage V2 for forming a state where the Taylor cone is stably formed and misty droplets are sprayed from the tip of the Taylor cone is applied, in performing a spraying action by the nozzle 1. |
