| 摘要 |
PROBLEM TO BE SOLVED: To provide a physical quantity sensor preventing sticking between a support substrate and a moving part.SOLUTION: A physical quantity sensor 1 includes: a support substrate 2 on which fixed electrodes 38 and 39 are disposed; and a moving part that is disposed on the support substrate 2, face the fixed electrodes 38 and 39, and has movable electrodes 36 and 37 that displace according to a physical quantity applied thereto. The support substrate 2 includes a first irregularity part 26 on a principal surface facing the moving part, and the moving part includes a second irregularity part 60 on the principal surface facing the support substrate 2. At least part of protrusions 28 of the first irregularity part 26 faces recesses 62 of the second irregularity part 60 in the plan view. |
