PREPARATION METHOD OF POLY-URETHANE MOUNTING PAD

摘要

The present invention relates to a method for preparing a polyurethane support pad, the method comprising the steps of: wet coagulating a resin composition comprising a polyurethane resin having a weight average molecular weight of 220,000-1,000,000, and a DMF solvent; and dipping the wet coagulated product in a dipping solution at 40-90°C. According to the method, it is possible to provide a polyurethane support pad capable of showing a low hardness, excellent compressibility and the like by uniformly forming long and large pores inside the prepared pad, showing more uniform thickness, pressure distribution, tension distribution or the like all over the pad, and implementing more uniform and highly efficient polishing.