FABRICATION OF HOLLOW-HEMISPHERE THIN FILMS AND ITS PIEZOELECTRIC NANOGENERATOR FOR ENERGY HARVESTING

摘要

According to the present invention, a small piezoelectric generator using a hollow-hemisphere thin film includes: a substrate; a lower electrode formed on the substrate; a hollow-hemisphere piezoelectric thin film layer formed on the lower electrode; an insulating layer formed on the hollow-hemisphere piezoelectric thin film layer; and an upper electrode formed on the insulating layer. The small piezoelectric generator can be miniaturized and can significantly reduce cost for collecting energy.