| 发明名称 |
SUBSTRATE HOLDER AND LITHOGRAPHIC APPARATUS |
| 摘要 |
An object holder for a lithographic apparatus has a main body having a surface. A plurality of burls to support an object is formed on the surface or in apertures of a thin-film stack. At least one of the burls is formed by laser-sintering. At least one of the burls formed by laser-sintering may be a repair of a damaged burl previously formed by laser-sintering or another method. |
| 申请公布号 |
KR20140114430(A) |
申请公布日期 |
2014.09.26 |
| 申请号 |
KR20147022756 |
申请日期 |
2013.01.17 |
| 申请人 |
ASML NETHERLANDS B.V. |
发明人 |
LAFARRE RAYMOND WILHELMUS LOUIS;DONDERS SJOERD NICOLAAS LAMBERTUS;TEN KATE NICOLAAS;DZIOMKINA NINA VLADIMIROVNA;KARADE YOGESH;RODENBURG ELISABETH CORINNE |
| 分类号 |
H01L21/027;G03F7/20 |
主分类号 |
H01L21/027 |
| 代理机构 |
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