A fluid supply system adapted for vacuum and pressure cycling of fluid, including a transfer vessel adapted to supply a process canister with fluid drawn from a bulk canister under a vacuum, wherein delivery of fluid from the transfer vessel to the process canister is accomplished with positive pressure. A method is also disclosed of delivering fluid, including drawing fluid under vacuum from a bulk canister and pressurizing the transfer vessel to effect dispensing of the fluid into a process canister for delivery to a location of use.
申请公布号
SG11201405141T(A)
申请公布日期
2014.09.26
申请号
SGT11201405141
申请日期
2013.02.22
申请人
ADVANCED TECHNOLOGY MATERIALS, INC.
发明人
HODGES, JORDAN;CHISM, RICHARD, D;MCFERON, MITCHELL, W.;WARE, DONALD, D.;TOM, GLENN, M.