HIDDEN HINGE MEMS WITH TEMPORARY GIMBAL ANCHOR

摘要

Micro-electro-mechanical system (MEMS) mirror devices and manufacturing methods thereof. The device comprising a hinge layer having orthogonal tilt and roll hinges connecting inner and outer platforms such that the inner platform has bi-directional rotation. An electrode layer connected beneath the hinge layer controls rotation of the platforms. A mirror layer above the hinge layer comprises a mirror connected to the inner platform via a pedestal and fixed membrane connected to the hinge layer but detached from the mirror. An anchor temporarily reduces movement of the outer platform during fabrication. In a fabrication state, the anchor anchors the outer platform to the mirror layer's fixed membrane. In a post-fabrication state, a gap releases the outer platform.

主权项

1. A micro-electro-mechanical system (MEMS) device comprising:
a hinge layer including a fixed membrane having roll hinges connected to an outer platform having tilt hinges connected to an inner platform, the tilt hinges defining an axis of tilt rotation orthogonal to an axis of roll rotation defined by the roll hinges such that the inner platform is provided two degrees of rotational freedom; an electrode layer, connected beneath the hinge layer, for receiving electrical control signals, the electrode layer comprising roll means for electrically biasing roll rotation of the outer platform and the inner platform and tilt means for electrically biasing tilt rotation of the inner platform; a mirror layer above the hinge layer comprising an outwardly extending mirror connected to the inner platform via a pedestal and a fixed membrane connected to the fixed membrane of the hinge layer but detached from the mirror; an anchor for temporarily reducing movement of the outer platform during fabrication, the anchor having a fabrication state where the anchor anchored the outer platform to the fixed membrane of the mirror layer and a post-fabrication state where a gap was defined to release the outer platform.