DISPLACEMENT DEVICES AND METHODS FOR FABRICATION, USE AND CONTROL OF SAME

摘要

Displacement devices comprise a stator and a moveable stage. The stator comprises a plurality of coils shaped to provide pluralities of generally linearly elongated coil traces in one or more layers. Layers of coils may overlap in the Z-direction. The moveable stage comprises a plurality of magnet arrays. Each magnet array may comprise a plurality of magnetization segments generally linearly elongated in a corresponding direction. Each magnetization segment has a magnetization direction generally orthogonal to the direction in which it is elongated and at least two of the magnetization directions are different from one another. One or more amplifiers may be connected to selectively drive current in the coil traces and to thereby effect relative movement between the stator and the moveable stage.

主权项

1. A displacement device comprising:
a stator comprising a plurality of elongated coils shaped to provide a working region wherein traces of the coils are generally linearly oriented, the plurality of elongated coils comprising:
a first plurality of coil traces distributed over a first layer at a corresponding first stator Z-location, the first plurality of coil traces generally linearly elongated in a first stator direction in the first layer; anda second plurality of coil traces distributed over a second layer at a corresponding second stator Z-location, the second plurality of coil traces generally linearly elongated in a second stator direction in the second layer, the second stator direction non-parallel with the first stator direction;the first and second layers overlapping one another in a stator Z-direction in the working region, the stator Z-direction generally orthogonal to both the first stator direction and the second stator direction; and a moveable stage comprising a plurality of magnet arrays, the plurality of magnet arrays comprising:
a first magnet array comprising a plurality of first magnetization segments generally linearly elongated in a first stage direction, each first magnetization segment having a magnetization direction generally orthogonal to the first stage direction and at least two of the first magnetization segments having magnetization directions that are different from one another; anda second magnet array comprising a plurality of second magnetization segments generally linearly elongated in a second stage direction non-parallel to the first stage direction, each second magnetization segment having a magnetization direction generally orthogonal to the second stage direction and at least two of the second magnetization segments having magnetization directions that are different from one another; and one or more amplifiers connected to drive current in the first and second pluralities of coil traces and to thereby effect relative movement between the stator and the moveable stage.