发明名称 RESISTANCE RANDOM ACCESS MEMORY DEVICE
摘要 A resistance random access memory device according to one embodiment includes an interlayer insulation film which a trench is made therein, an ion supply layer provided along a bottom surface and a side surface of the trench, a portion of the ion supply layer provided along the bottom surface is thicker than a portion of the ion supply layer provided along the side surface, and a resistance change layer provided at least below the ion supply layer.
申请公布号 US2014284536(A1) 申请公布日期 2014.09.25
申请号 US201313954169 申请日期 2013.07.30
申请人 Kabushiki Kaisha Toshiba 发明人 ARAYASHIKI Yusuke;SUGIMAE Kikuko
分类号 H01L45/00 主分类号 H01L45/00
代理机构 代理人
主权项 1. A resistance random access memory device, comprising: an interlayer insulation film, a trench being made in the interlayer insulation film; an ion supply layer provided along a bottom surface and a side surface of the trench, a portion of the ion supply layer provided along the bottom surface being thicker than a portion of the ion supply layer provided along the side surface; and a resistance change layer provided at least below the ion supply layer.
地址 Minato-ku JP