| 摘要 |
The invention relates to a method for generating image data relating to an object (100) and to a particle beam device for carrying out this method. In the method, a marking (103, 104) is arranged in the object or in the support material for the object, at least one examination region (105) of the object is determined, the examination region is exposed by removing material of the object and/or of the support material, a first particle beam is guided over the exposed examination region, and image data relating to the exposed examination region (106) are acquired using a detector (22, 23) by detecting interaction particles and/or interaction radiation on account of interaction between the first particle beam and the exposed examination region. In this case, the examination region can be determined by means of a tomographic method, by means of x-ray microscopy or by means of laser scanning microscopy. |
