| 摘要 |
PROBLEM TO BE SOLVED: To stably form drive electrodes that have a sufficient thickness on inner wall surfaces of grooves by electroless plating, and also stably form an electrode terminal section conducted to the drive electrodes on a principal surface of a piezoelectric plate, with a sufficient thickness.SOLUTION: A method for manufacturing a head chip includes: a catalyst application step of applying a catalyst on a piezoelectric plate 40 formed with a plurality of grooves 45 thereon, by the immersion into a predetermined water solution; and an electroless plating step of forming drive electrodes 50, 52 and electrode terminal sections 51, 53 by precipitating a metal coating on a portion applied with the catalyst. The catalyst application step includes a first catalyst application step of applying the catalyst while applying the ultrasonic vibration of a predetermined frequency to the water solution, and a second catalyst application step of applying the catalyst without applying the water solution to the ultrasonic vibration, which are performed at least by one time, respectively, in no particular order. |
