发明名称 PRODUCTION METHOD OF SILICON CARBIDE MEMBER ASSEMBLY, AND SILICON CARBIDE ASSEMBLY
摘要 PROBLEM TO BE SOLVED: To provide a production method of a silicon carbide member assembly, in which silicon carbide members are joined together without interposing any auxiliary material between joint surfaces in joining, for the purpose of solving such a problem that in joining silicon carbide members together, a crack and peeling occur to the assembly using the auxiliary material on increase and decrease in temperature, and to provide the assembly corresponding thereto.SOLUTION: A production method of a silicon carbide member assembly which is formed by joining silicon carbide (SiC) members together on joint surfaces thereof has: a preparation step to diffuse sodium (Na) into a joint surface of one silicon carbide member; and a joining step to heat-treat the silicon carbide members in a state of holding them such that the joint surface of the silicon carbide member subjected to the preparation step and that of the other silicon carbide member not subjected thereto are in close contact with each other, and to form the assembly by joining the silicon carbide member subjected to the preparation step and the other silicon carbide member. The assembly corresponding thereto is also provided.
申请公布号 JP2014177380(A) 申请公布日期 2014.09.25
申请号 JP20130052620 申请日期 2013.03.15
申请人 STANLEY ELECTRIC CO LTD 发明人 HORIO TADASHI
分类号 C04B37/00;C23C16/44;H01L21/365;H01L21/683 主分类号 C04B37/00
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