| 摘要 |
PROBLEM TO BE SOLVED: To provide electrical continuity between a substrate having shutters thereon and an opposing substrate.SOLUTION: A first substrate 10 is provided with shutters 28 for controlling transmission and blockage of light, drive sections 52 for driving the shutters 28, and protruded portions 62, each having a plurality of side surfaces 66 rising from the first substrate 10 so as to surround a predetermined space, where each of the shutters 28, drive sections 52, and protruded portions 62 has a laminated structure comprising a first conductive film 54 and an insulating film 16. An outermost layer of each of the plurality of side surfaces 66 is the insulating film 16 covering the first conductive film 54 and includes an opening 68 that exposes a portion of the first conductive film 54. A conductive particle 70 is provided in a predetermined space surrounded by the plurality of side surfaces 66 such that the conductive particle 70 is in contact with the portions of the first conductive film 54 exposed through the openings 68 on the plurality of side surfaces 66 on the first substrate 10 side, and with a second conductive film 22 on a second substrate 12 side. |
