发明名称 |
DISPLAY DEVICE HAVING MEMS TRANSMISSIVE LIGHT VALVE AND METHOD FOR FORMING THE SAME |
摘要 |
A display device having a MEMS transmissive light valve and a method for forming the same are provided. The method includes: providing a multilayer semiconductor substrate comprising a bottom semiconductor layer, a middle buried layer and a top semiconductor layer; forming a light guide opening in the top semiconductor layer; forming at least one MOS device in a remaining part of the top semiconductor layer; forming an interconnection layer and an interlayer dielectric layer on the at least one MOS; forming a MEMS transmissive light valve, which is electrically connected to the interconnection layer, on the light guide opening, where the MEMS transmissive light valve is surrounded by the interlayer dielectric layer; forming a transparent backplane on a top surface of the interlayer dielectric layer; and removing the bottom semiconductor layer. |
申请公布号 |
US2014284632(A1) |
申请公布日期 |
2014.09.25 |
申请号 |
US201414215076 |
申请日期 |
2014.03.17 |
申请人 |
LEXVU OPTO MICROELECTRONICS TECHNOLOGY (SHANGHAI) LTD |
发明人 |
MAO Jianhong;TANG Deming |
分类号 |
H01L33/10 |
主分类号 |
H01L33/10 |
代理机构 |
|
代理人 |
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主权项 |
1. A method for forming a display device having a MEMS transmissive light valve, comprising:
providing a multilayer semiconductor substrate comprising a bottom semiconductor layer, a middle buried layer and a top semiconductor layer; forming a light guide opening in the top semiconductor layer; forming at least one MOS device in a remaining part of the top semiconductor layer; forming an interconnection layer and an interlayer dielectric layer on the at least one MOS device; forming a MEMS transmissive light valve, which is electrically connected to the interconnection layer, on the light guide opening, where the MEMS transmissive light valve is surrounded by the interlayer dielectric layer; forming a transparent backplane on a top surface of the interlayer dielectric layer; and removing the bottom semiconductor layer. |
地址 |
Shanghai CN |