METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY APPARATUS, AND ORGANIC LIGHT-EMITTING DISPLAY APPARATUS MANUFACTURED BY THE METHOD

摘要

A method of manufacturing an organic light emitting display apparatus, and an organic light emitting display apparatus manufactured by the method, the method being suitable for mass producing a large substrate, enabling high-definition patterning, and allowing controlling of a distance between a patterning slit sheet and a substrate which are moved relative to each other.

主权项

1. A method of manufacturing an organic light emitting display apparatus, the method comprising:
fixing a substrate to a transfer unit at a loading unit; transporting the transfer unit on which the substrate is fixed in a first direction into a chamber by using a first conveyer unit that passes through the chamber; depositing a deposition material that is emitted from a deposition assembly by moving one of the substrate or the deposition assembly relative to the other, while the deposition assembly arranged in the chamber and the substrate are separated from each other by a distance; separating the substrate on which deposition is completed from the transfer unit at an unloading unit; and transporting the transfer unit that is separated from the substrate to the loading unit by using a second conveyer unit, wherein the depositing of the deposition material comprises measuring an interval between the substrate and the deposition assembly while the one of the substrate or the deposition assembly moves relative to the other.