发明名称 FLUORESCENT EXCIMER LAMP AND FLUID TREATMENT APPARATUS
摘要 <p>The present invention provides a fluorescent excimer lamp and a fluid treatment apparatus, the fluorescent excimer lamp radiating ultraviolet light at a high efficiency and suppressing the deterioration of a fluorescent body. A fluorescent excimer lamp (10) has a vacuum ultraviolet light source (11) and an outside tube (14). The vacuum ultraviolet light source (11) includes a discharge tube (12) and a pair of electrodes (13A, 13B). The discharge tube (12) is made of a dielectric body enclosing a light-emitting gas. The electrodes (13A, 13B) are disposed opposite each other across the light-emitting gas and the dielectric body forming the discharge tube (12). The outside tube (14) has a fluorescent body layer (15) formed on an inner surface, is disposed on the outer circumference of the vacuum ultraviolet light source (11) across a void, and houses the vacuum ultraviolet light source (11). The fluorescent excimer lamp (10) is characterized in that both ends of the outside tube (14) are hermetically sealed, and an inert gas is enclosed in the void (D) in the outside tube (14).</p>
申请公布号 WO2014148325(A1) 申请公布日期 2014.09.25
申请号 WO2014JP56417 申请日期 2014.03.12
申请人 USHIO DENKI KABUSHIKI KAISHA 发明人 TANINO, KENJI;SENGOKU, NORIHIRO;ASAYAMA, JUNYA;HISHINUMA, NOBUYUKI
分类号 H01J65/00;H01J61/34;H01J61/42 主分类号 H01J65/00
代理机构 代理人
主权项
地址