SUBSTRATE PROCESSING SYSTEMS AND ROBOT APPARATUS FOR TRANSPORTING SUBSTRATES IN ELECTRONIC DEVICE MANUFACTURING

摘要

Robot apparatus, substrate transport systems, and methods are described. The robot apparatus and systems are adapted to efficiently put or pick substrates at a destination by rotating a boom linkage to a position adjacent to the destination and then actuating robot assemblies to put or pick the substrates at the destination. Numerous other aspects are provided.

主权项

1. A robot apparatus, comprising:
a boom linkage adapted to be rotated about a rotational axis, the boom linkage includes a first cantilever beam and a second cantilever beam extending in two directions from the rotational axis; one and only one first robot assembly mounted to the first cantilever beam at a first shoulder axis, the first robot assembly including:
a first upper arm mounted for rotation on the boom linkage about the first shoulder axis, the first upper arm extending inwardly from the first shoulder axis towards the rotational axis of the boom linkage,a first forearm coupled to an outboard end of the first upper arm,a first wrist member coupled to an outboard end of the first forearm, anda first end effector included on the first wrist member; and one and only one second robot assembly mounted to the second cantilever beam at a second shoulder axis, the second robot assembly including:
a second upper arm mounted for rotation on the boom linkage about the second shoulder axis, the second upper arm extending inwardly from the second shoulder axis towards the rotational axis of the boom linkage,a second forearm coupled to an outboard end of the second upper arm,a second wrist member coupled to an outboard end of the second forearm, anda second end effector included on the second wrist member.