MANUFACTURING METHOD OF LIQUID EJECTING HEAD

摘要

A piezoelectric actuator which is provided on the flow path formation substrate, and a protection substrate which is bonded to the flow path formation substrate on the piezoelectric actuator side, the method including: bonding the flow path formation substrate on which the piezoelectric actuator is formed, and the protection substrate to form a bonded body; bonding a sealing member to the protection substrate of the bonded body on the surface side opposite the flow path formation substrate, and disposing a protection material containing a nitro compound in a space between the sealing member and the protection substrate.

主权项

1. A manufacturing method of a liquid ejecting head including a flow path formation substrate on which a pressure generation chamber communicating with nozzle openings for ejecting liquid is formed, a piezoelectric actuator which is provided on the flow path formation substrate, and a protection substrate which is bonded to the flow path formation substrate on the piezoelectric actuator side, the method comprising:
bonding the flow path formation substrate on which the piezoelectric actuator is formed, and the protection substrate to form a bonded body; bonding a sealing member to the protection substrate of the bonded body on the surface side opposite the flow path formation substrate, and disposing a protection material containing a nitro compound in a space between the sealing member and the protection substrate; and performing wet etching of the flow path formation substrate of the bonded body to which the sealing member is bonded, to form the pressure generation chamber.