FINE PATTERN FORMING SYSTEM AND FINE PATTERN FORMING METHOD

摘要

The present invention relates to a system for forming a fine pattern, the system comprising: a conveying unit for continuously conveying a substrate having an engraved pattern formed therein; and a filling unit for supplying the substrate with a filler material and simultaneously filling the engraved pattern with the filler material by rotating about an imaginary axis of rotation perpendicular to the substrate while being in contact with the substrate.