| 摘要 |
PROBLEM TO BE SOLVED: To enhance the utilization rate in a vacuum processing apparatus connected with a plurality of vacuum transfer chambers via a vacuum transfer intermediate chamber.SOLUTION: In an operation method of a vacuum processing apparatus having a plurality of vacuum transfer chambers connected via a vacuum transfer intermediate chamber, and a plurality of vacuum processing containers, the plurality of vacuum transfer chambers are interconnected via the vacuum transfer intermediate chamber, purge gas is supplied to the vacuum transfer chambers connected with a lock chamber, out of the plurality of vacuum transfer chambers, the transfer chambers of vacuum transfer chambers remote from the lock chamber are evacuated, and the pressure in all transfer chambers of the plurality of vacuum transfer chambers is set higher than the pressure in the vacuum processing containers. |
