| 发明名称 |
ORGANIC ELECTROLUMINESCENCE DEVICE, ORGANIC ELECTROLUMINESCENCE DEVICE MANUFACTURING METHOD, AND FILM FORMING METHOD |
| 摘要 |
<p>The present invention includes the following: a step in which an organic EL element which includes an organic layer is formed on a lower substrate; and a step in which a laminated body which includes an amorphous silicon nitride film and a plasma polymerized film is formed on the organic EL element by using a surface wave excitation plasma chemical vapor deposition method.</p> |
| 申请公布号 |
WO2014147789(A1) |
申请公布日期 |
2014.09.25 |
| 申请号 |
WO2013JP58078 |
申请日期 |
2013.03.21 |
| 申请人 |
SHIMADZU CORPORATION |
发明人 |
UENO, SATOKO;SUZUKI, MASAYASU;KONISHI, YOSHIYUKI;AZUMA, KAZUFUMI |
| 分类号 |
H05B33/04;H01L51/50;H05B33/10 |
主分类号 |
H05B33/04 |
| 代理机构 |
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