Vapor Delivery Device, Methods of Manufacture And Methods of Use Thereof

摘要

A method comprises transporting a first stream of a carrier gas to a delivery device that contains a solid precursor compound. The first stream of carrier gas is at a temperature greater than or equal to 20° C. The method further comprises transporting a second stream of the carrier gas to a point downstream of the delivery device. The first stream and the second stream are combined to form a third stream, such that the dewpoint of the vapor of the solid precursor compound in the third stream is lower than the ambient temperature. The flow direction of the first stream, the flow direction of the second stream and the flow direction of the third stream are unidirectional and are not opposed to each other.

主权项

1. A method comprising:
transporting a first stream of a carrier gas to a delivery device; the delivery device being part of a delivery system; where the delivery device contains a precursor compound; the first stream of carrier gas being at a temperature greater than or equal to 20° C.; transporting a second stream of the carrier gas to a point downstream of the delivery device; wherein a flow direction of the first stream and a flow direction of the second stream are not opposed to each other; and combining the first stream and the second stream to form a third stream; where a dewpoint of a vapor of the precursor compound in the third stream is lower than an ambient temperature.