发明名称 |
PROCESSING SYSTEMS, APPARATUS, AND METHODS ADAPTED TO PROCESS SUBSTRATES IN ELECTRONIC DEVICE MANUFACTURING |
摘要 |
A via pass-through apparatus is disclosed. The via pass-through apparatus includes a pass-through chamber adapted to couple between a first mainframe section and a second mainframe section of a substrate processing system, the pass-through chamber including an entry and an exit each having a slit valve, and a via process chamber located at a different level than the pass-through chamber wherein the via process chamber is adapted to carry out a process on a substrate at the via location. Systems and methods of operating the system are provided, as are numerous other aspects. |
申请公布号 |
WO2014150234(A1) |
申请公布日期 |
2014.09.25 |
申请号 |
WO2014US22656 |
申请日期 |
2014.03.10 |
申请人 |
APPLIED MATERIALS, INC |
发明人 |
HONGKHAM, STEVE S.;REUTER, PAUL B.;ENGLHARDT, ERIC A.;BALASUBRAMANIAN, GANESH;CHEN, XINGLONG;ROCHA-ALVAREZ, JUANCARLOS |
分类号 |
H01L21/02 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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